We offer various equipment.
UV Irradiation System
（300mm Semi-Automatic UV Irradiation System）
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1．Comparison with our conventional 300mm semi-automatic UV irradiation system
- Footprint reduced by approximately 16.5%
- Operability improved by concentrating operation interfaces in one place
- Visibility improved by installing touch screen at an angle of 45 degrees (conforms to SEMI standard)
- Double irradiation of 150mm wafer ring frames (optional)
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2．High precision irradiation with constant illuminance
Square-wave lighting utilizing a high frequency inverter offers high precision, reliable UV irradiation with optimized illuminance and light intensity.
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3．Automatic feedback illuminance control
A built-in sensor enables feedback control to keep constant UV lighting output. By maintaining steady lighting throughout the lamp's life, the system contributes to fabrication of a constant quantity of semiconductors.
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4．Easy operation with one button
This equipment improves operability and stability with center loading, while significantly stepping up operational efficiency.
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5．Quick and uniform irradiation of entire surface
Uniform irradiation of the entire surface is assured through mobilization of a nitrogen-filled chamber. Irradiation speed can be freely adjusted in accordance with conditions including wafer size and type.
