We offer various equipment.
UV Irradiation System (200mm Fully-Automatic UV Irradiation System)
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1.Fully-automatic improved process speed
This is a fully-automatic system with integrated cassette loader and unloader increases operational efficiency.
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2.Controllable illuminance and light intensity
This equipment allows control of illuminance and light intensity for effective UV irradiation with high output UV lamp.
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3.Uniform irradiation of entire surface
It adopts the method in which irradiation takes place during movement, achieving uniform irradiation of the entire surface.
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4.Self-diagnosis function supports quality control
This is high performance system incorporates a self-diagnosis function that accurately detects irradiation errors.
Options
- Host communication function
communication format: conforms to SECS-I and HSMS/Software: conforms to GEM